Volume 26, Issue 3 p. 128-136
Special Section Paper

High resolution photolithography for direct view active matrix organic light-emitting diode augmented reality displays

Paweł E. Malinowski

Corresponding Author

Paweł E. Malinowski

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

Correspondence to: Pawel Malinowsk, IMEC, Kapeldreef 75, 3001 Leuven, Belgium; e-mail: [email protected].Search for more papers by this author
Tung-Huei Ke

Tung-Huei Ke

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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Atsushi Nakamura

Atsushi Nakamura

FUJIFILM Electronic Materials (EUROPE) N.V, Keetberglaan 1/A, 2070 Zwijndrecht, Belgium

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Ya-Han Liu

Ya-Han Liu

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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Dieter Vander Velpen

Dieter Vander Velpen

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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Erwin Vandenplas

Erwin Vandenplas

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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Nikolas Papadopoulos

Nikolas Papadopoulos

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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Auke Jisk Kronemeijer

Auke Jisk Kronemeijer

TNO/Holst Centre, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands

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Jan-Laurens van der Steen

Jan-Laurens van der Steen

TNO/Holst Centre, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands

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Soeren Steudel

Soeren Steudel

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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Che-Cheng Kuo

Che-Cheng Kuo

Chungwha Picture Tubes, LDT, 1127 Heping Rd., Bade City, Taoyuan, Taiwan

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Yen-Yu Huang

Yen-Yu Huang

Chungwha Picture Tubes, LDT, 1127 Heping Rd., Bade City, Taoyuan, Taiwan

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Yu-Hsien Chen

Yu-Hsien Chen

Chungwha Picture Tubes, LDT, 1127 Heping Rd., Bade City, Taoyuan, Taiwan

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Ming-Hua Yeh

Ming-Hua Yeh

Chungwha Picture Tubes, LDT, 1127 Heping Rd., Bade City, Taoyuan, Taiwan

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Gerwin Gelinck

Gerwin Gelinck

TNO/Holst Centre, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands

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Paul Heremans

Paul Heremans

IMEC, Kapeldreef 75, 3001 Leuven, Belgium

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First published: 02 April 2018
Citations: 22

Abstract

High-resolution RGB organic light-emitting diode frontplane is a key enabler for direct-view transparent augmented reality displays. In this paper, we demonstrate 1250 ppi passive displays and semi-transparent active displays. Organic light-emitting diode photolithography can provide pixel density above 1000 ppi while keeping effective emission area high because of high aperture ratio. Patterns with 2 μm line pitch were successfully transferred to emission layers, indicating possible further pixel density scaling. Lifetime after patterning, key parameter enabling industrialization, is above 150 h (T90 at 1000 nit).